2/7/2013	7:48:33 AM	Helium valve closed
2/7/2013	7:48:33 AM	H2 valve closed
2/7/2013	7:48:33 AM	BCl3 valve closed
2/7/2013	7:48:33 AM	PH3 valve closed
2/7/2013	7:48:33 AM	SiCl4 pre valve closed
2/7/2013	7:48:33 AM	SiCl4 post valve closed
2/7/2013	7:48:33 AM	Main Vac valve closed
2/7/2013	7:48:33 AM	Bypass valve closed
2/7/2013	7:48:33 AM	Bubbler valve closed
2/7/2013	7:48:33 AM	Helium MFC set to  0.000000
2/7/2013	7:48:33 AM	H2 MFC set to  0.000000
2/7/2013	7:48:33 AM	BCl3 MFC set to  0.000000
2/7/2013	7:48:33 AM	PH3 MFC set to  0.000000
2/7/2013	7:48:33 AM	SiCl4 MFC set to  0.000000
2/7/2013	7:48:33 AM	Bypass solenoid MFC set to  0.000000
2/7/2013	7:48:33 AM	Tube furnace set to 0
2/7/2013	7:48:36 AM	Helium valve closed
2/7/2013	7:48:36 AM	BCl3 valve closed
2/7/2013	7:48:36 AM	PH3 valve closed
2/7/2013	7:48:36 AM	SiCl4 pre valve closed
2/7/2013	7:48:36 AM	SiCl4 post valve closed
2/7/2013	7:48:36 AM	Main Vac valve closed
2/7/2013	7:48:36 AM	Bypass valve closed
2/7/2013	7:48:36 AM	Bubbler valve closed
2/7/2013	7:48:36 AM	H2 valve opened
2/7/2013	7:48:36 AM	Helium MFC set to  0.000000
2/7/2013	7:48:36 AM	H2 MFC set to  500.000000
2/7/2013	7:48:36 AM	BCl3 MFC set to  0.000000
2/7/2013	7:48:36 AM	PH3 MFC set to  0.000000
2/7/2013	7:48:36 AM	SiCl4 MFC set to  0.000000
2/7/2013	7:48:36 AM	Bypass solenoid MFC set to  0.000000
2/7/2013	7:48:36 AM	Tube furnace set to 0
2/7/2013	7:49:52 AM	Helium valve closed
2/7/2013	7:49:52 AM	BCl3 valve closed
2/7/2013	7:49:52 AM	PH3 valve closed
2/7/2013	7:49:52 AM	SiCl4 pre valve closed
2/7/2013	7:49:52 AM	SiCl4 post valve closed
2/7/2013	7:49:52 AM	Main Vac valve closed
2/7/2013	7:49:52 AM	Bypass valve closed
2/7/2013	7:49:52 AM	H2 valve opened
2/7/2013	7:49:52 AM	Bubbler valve opened
2/7/2013	7:49:52 AM	Helium MFC set to  0.000000
2/7/2013	7:49:52 AM	H2 MFC set to  500.000000
2/7/2013	7:49:52 AM	BCl3 MFC set to  0.000000
2/7/2013	7:49:53 AM	PH3 MFC set to  0.000000
2/7/2013	7:49:53 AM	SiCl4 MFC set to  0.000000
2/7/2013	7:49:53 AM	Bypass solenoid MFC set to  0.000000
2/7/2013	7:49:53 AM	Tube furnace set to 0
2/7/2013	7:49:54 AM	Helium valve closed
2/7/2013	7:49:54 AM	BCl3 valve closed
2/7/2013	7:49:54 AM	PH3 valve closed
2/7/2013	7:49:54 AM	SiCl4 pre valve closed
2/7/2013	7:49:54 AM	SiCl4 post valve closed
2/7/2013	7:49:54 AM	Main Vac valve closed
2/7/2013	7:49:54 AM	Bypass valve closed
2/7/2013	7:49:54 AM	H2 valve opened
2/7/2013	7:49:54 AM	Bubbler valve opened
2/7/2013	7:49:54 AM	Helium MFC set to  0.000000
2/7/2013	7:49:54 AM	H2 MFC set to  500.000000
2/7/2013	7:49:54 AM	BCl3 MFC set to  0.000000
2/7/2013	7:49:54 AM	PH3 MFC set to  0.000000
2/7/2013	7:49:54 AM	SiCl4 MFC set to  0.000000
2/7/2013	7:49:54 AM	Bypass solenoid MFC set to  0.000000
2/7/2013	7:49:54 AM	Tube furnace set to 1000
2/7/2013	8:09:54 AM	Helium valve closed
2/7/2013	8:09:54 AM	BCl3 valve closed
2/7/2013	8:09:54 AM	Main Vac valve closed
2/7/2013	8:09:54 AM	Bypass valve closed
2/7/2013	8:09:54 AM	H2 valve opened
2/7/2013	8:09:54 AM	PH3 valve opened
2/7/2013	8:09:54 AM	SiCl4 pre valve opened
2/7/2013	8:09:54 AM	SiCl4 post valve opened
2/7/2013	8:09:54 AM	Bubbler valve opened
2/7/2013	8:09:54 AM	Helium MFC set to  0.000000
2/7/2013	8:09:54 AM	H2 MFC set to  450.000000
2/7/2013	8:09:54 AM	BCl3 MFC set to  0.000000
2/7/2013	8:09:54 AM	PH3 MFC set to  0.050000
2/7/2013	8:09:54 AM	SiCl4 MFC set to  50.000000
2/7/2013	8:09:54 AM	Bypass solenoid MFC set to  0.000000
2/7/2013	8:09:54 AM	Tube furnace set to 1000
2/7/2013	8:29:54 AM	Helium valve closed
2/7/2013	8:29:54 AM	BCl3 valve closed
2/7/2013	8:29:54 AM	PH3 valve closed
2/7/2013	8:29:54 AM	SiCl4 pre valve closed
2/7/2013	8:29:54 AM	SiCl4 post valve closed
2/7/2013	8:29:54 AM	Main Vac valve closed
2/7/2013	8:29:54 AM	Bypass valve closed
2/7/2013	8:29:54 AM	H2 valve opened
2/7/2013	8:29:54 AM	Bubbler valve opened
2/7/2013	8:29:54 AM	Helium MFC set to  0.000000
2/7/2013	8:29:54 AM	H2 MFC set to  500.000000
2/7/2013	8:29:54 AM	BCl3 MFC set to  0.000000
2/7/2013	8:29:54 AM	PH3 MFC set to  0.000000
2/7/2013	8:29:54 AM	SiCl4 MFC set to  0.000000
2/7/2013	8:29:54 AM	Bypass solenoid MFC set to  0.000000
2/7/2013	8:29:54 AM	Tube furnace set to 950
2/7/2013	8:31:54 AM	Helium valve closed
2/7/2013	8:31:54 AM	BCl3 valve closed
2/7/2013	8:31:54 AM	PH3 valve closed
2/7/2013	8:31:54 AM	SiCl4 pre valve closed
2/7/2013	8:31:54 AM	SiCl4 post valve closed
2/7/2013	8:31:54 AM	Main Vac valve closed
2/7/2013	8:31:54 AM	Bypass valve closed
2/7/2013	8:31:54 AM	H2 valve opened
2/7/2013	8:31:54 AM	Bubbler valve opened
2/7/2013	8:31:54 AM	Helium MFC set to  0.000000
2/7/2013	8:31:54 AM	H2 MFC set to  500.000000
2/7/2013	8:31:54 AM	BCl3 MFC set to  0.000000
2/7/2013	8:31:54 AM	PH3 MFC set to  0.000000
2/7/2013	8:31:54 AM	SiCl4 MFC set to  0.000000
2/7/2013	8:31:54 AM	Bypass solenoid MFC set to  0.000000
2/7/2013	8:31:54 AM	Tube furnace set to 900
2/7/2013	8:33:54 AM	Helium valve closed
2/7/2013	8:33:54 AM	BCl3 valve closed
2/7/2013	8:33:54 AM	PH3 valve closed
2/7/2013	8:33:54 AM	SiCl4 pre valve closed
2/7/2013	8:33:54 AM	SiCl4 post valve closed
2/7/2013	8:33:54 AM	Main Vac valve closed
2/7/2013	8:33:54 AM	Bypass valve closed
2/7/2013	8:33:55 AM	H2 valve opened
2/7/2013	8:33:55 AM	Bubbler valve opened
2/7/2013	8:33:55 AM	Helium MFC set to  0.000000
2/7/2013	8:33:55 AM	H2 MFC set to  500.000000
2/7/2013	8:33:55 AM	BCl3 MFC set to  0.000000
2/7/2013	8:33:55 AM	PH3 MFC set to  0.000000
2/7/2013	8:33:55 AM	SiCl4 MFC set to  0.000000
2/7/2013	8:33:55 AM	Bypass solenoid MFC set to  0.000000
2/7/2013	8:33:55 AM	Tube furnace set to 850
2/7/2013	8:35:55 AM	H2 valve closed
2/7/2013	8:35:55 AM	BCl3 valve closed
2/7/2013	8:35:55 AM	PH3 valve closed
2/7/2013	8:35:55 AM	SiCl4 pre valve closed
2/7/2013	8:35:55 AM	SiCl4 post valve closed
2/7/2013	8:35:55 AM	Main Vac valve closed
2/7/2013	8:35:55 AM	Bypass valve closed
2/7/2013	8:35:55 AM	Helium valve opened
2/7/2013	8:35:55 AM	Bubbler valve opened
2/7/2013	8:35:55 AM	Helium MFC set to  500.000000
2/7/2013	8:35:55 AM	H2 MFC set to  0.000000
2/7/2013	8:35:55 AM	BCl3 MFC set to  0.000000
2/7/2013	8:35:55 AM	PH3 MFC set to  0.000000
2/7/2013	8:35:55 AM	SiCl4 MFC set to  0.000000
2/7/2013	8:35:55 AM	Bypass solenoid MFC set to  0.000000
2/7/2013	8:35:55 AM	Tube furnace set to 800
2/7/2013	8:37:55 AM	H2 valve closed
2/7/2013	8:37:55 AM	BCl3 valve closed
2/7/2013	8:37:55 AM	PH3 valve closed
2/7/2013	8:37:55 AM	SiCl4 pre valve closed
2/7/2013	8:37:55 AM	SiCl4 post valve closed
2/7/2013	8:37:55 AM	Main Vac valve closed
2/7/2013	8:37:55 AM	Bypass valve closed
2/7/2013	8:37:55 AM	Helium valve opened
2/7/2013	8:37:55 AM	Bubbler valve opened
2/7/2013	8:37:55 AM	Helium MFC set to  500.000000
2/7/2013	8:37:55 AM	H2 MFC set to  0.000000
2/7/2013	8:37:55 AM	BCl3 MFC set to  0.000000
2/7/2013	8:37:55 AM	PH3 MFC set to  0.000000
2/7/2013	8:37:55 AM	SiCl4 MFC set to  0.000000
2/7/2013	8:37:55 AM	Bypass solenoid MFC set to  0.000000
2/7/2013	8:37:55 AM	Tube furnace set to 750
2/7/2013	8:39:55 AM	H2 valve closed
2/7/2013	8:39:55 AM	BCl3 valve closed
2/7/2013	8:39:55 AM	PH3 valve closed
2/7/2013	8:39:55 AM	SiCl4 pre valve closed
2/7/2013	8:39:55 AM	SiCl4 post valve closed
2/7/2013	8:39:55 AM	Main Vac valve closed
2/7/2013	8:39:55 AM	Bypass valve closed
2/7/2013	8:39:55 AM	Helium valve opened
2/7/2013	8:39:55 AM	Bubbler valve opened
2/7/2013	8:39:55 AM	Helium MFC set to  500.000000
2/7/2013	8:39:55 AM	H2 MFC set to  0.000000
2/7/2013	8:39:55 AM	BCl3 MFC set to  0.000000
2/7/2013	8:39:55 AM	PH3 MFC set to  0.000000
2/7/2013	8:39:55 AM	SiCl4 MFC set to  0.000000
2/7/2013	8:39:55 AM	Bypass solenoid MFC set to  0.000000
2/7/2013	8:39:55 AM	Tube furnace set to 0
2/7/2013	8:59:55 AM	Helium valve closed
2/7/2013	8:59:55 AM	H2 valve closed
2/7/2013	8:59:55 AM	BCl3 valve closed
2/7/2013	8:59:55 AM	PH3 valve closed
2/7/2013	8:59:55 AM	SiCl4 pre valve closed
2/7/2013	8:59:55 AM	SiCl4 post valve closed
2/7/2013	8:59:55 AM	Main Vac valve closed
2/7/2013	8:59:55 AM	Bypass valve closed
2/7/2013	8:59:55 AM	Bubbler valve closed
2/7/2013	8:59:55 AM	Helium MFC set to  0.000000
2/7/2013	8:59:55 AM	H2 MFC set to  0.000000
2/7/2013	8:59:55 AM	BCl3 MFC set to  0.000000
2/7/2013	8:59:55 AM	PH3 MFC set to  0.000000
2/7/2013	8:59:55 AM	SiCl4 MFC set to  0.000000
2/7/2013	8:59:55 AM	Bypass solenoid MFC set to  0.000000
2/7/2013	8:59:56 AM	Tube furnace set to 0
2/7/2013	8:59:57 AM	Helium valve closed
2/7/2013	8:59:57 AM	H2 valve closed
2/7/2013	8:59:57 AM	BCl3 valve closed
2/7/2013	8:59:57 AM	PH3 valve closed
2/7/2013	8:59:57 AM	SiCl4 pre valve closed
2/7/2013	8:59:57 AM	SiCl4 post valve closed
2/7/2013	8:59:57 AM	Main Vac valve closed
2/7/2013	8:59:57 AM	Bubbler valve closed
2/7/2013	8:59:57 AM	Bypass valve opened
2/7/2013	8:59:57 AM	Helium MFC set to  0.000000
2/7/2013	8:59:57 AM	H2 MFC set to  0.000000
2/7/2013	8:59:57 AM	BCl3 MFC set to  0.000000
2/7/2013	8:59:57 AM	PH3 MFC set to  0.000000
2/7/2013	8:59:57 AM	SiCl4 MFC set to  0.000000
2/7/2013	8:59:57 AM	Bypass solenoid MFC set to  0.000000
2/7/2013	8:59:57 AM	Tube furnace set to 0
2/7/2013	9:00:53 AM	Helium valve closed
2/7/2013	9:00:53 AM	H2 valve closed
2/7/2013	9:00:53 AM	BCl3 valve closed
2/7/2013	9:00:53 AM	PH3 valve closed
2/7/2013	9:00:53 AM	SiCl4 pre valve closed
2/7/2013	9:00:53 AM	SiCl4 post valve closed
2/7/2013	9:00:53 AM	Main Vac valve closed
2/7/2013	9:00:53 AM	Bubbler valve closed
2/7/2013	9:00:53 AM	Bypass valve opened
2/7/2013	9:00:53 AM	Helium MFC set to  0.000000
2/7/2013	9:00:53 AM	H2 MFC set to  0.000000
2/7/2013	9:00:53 AM	BCl3 MFC set to  0.000000
2/7/2013	9:00:53 AM	PH3 MFC set to  0.000000
2/7/2013	9:00:53 AM	SiCl4 MFC set to  0.000000
2/7/2013	9:00:53 AM	Bypass solenoid MFC set to  0.000000
2/7/2013	9:00:53 AM	Tube furnace set to 0
2/7/2013	9:01:53 AM	Helium valve closed
2/7/2013	9:01:53 AM	H2 valve closed
2/7/2013	9:01:53 AM	BCl3 valve closed
2/7/2013	9:01:53 AM	PH3 valve closed
2/7/2013	9:01:53 AM	SiCl4 pre valve closed
2/7/2013	9:01:53 AM	SiCl4 post valve closed
2/7/2013	9:01:53 AM	Bypass valve closed
2/7/2013	9:01:53 AM	Bubbler valve closed
2/7/2013	9:01:53 AM	Main Vac valve opened
2/7/2013	9:01:53 AM	Helium MFC set to  0.000000
2/7/2013	9:01:53 AM	H2 MFC set to  0.000000
2/7/2013	9:01:53 AM	BCl3 MFC set to  0.000000
2/7/2013	9:01:53 AM	PH3 MFC set to  0.000000
2/7/2013	9:01:53 AM	SiCl4 MFC set to  0.000000
2/7/2013	9:01:53 AM	Bypass solenoid MFC set to  0.000000
2/7/2013	9:01:53 AM	Tube furnace set to 0
2/7/2013	9:01:54 AM	Run finished at 9:01 AM
2/7/2013	10:01:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/7/2013	10:01:18 AM	Recipe started at 10:01 AM
2/7/2013	10:01:18 AM	Helium valve closed
2/7/2013	10:01:18 AM	H2 valve closed
2/7/2013	10:01:18 AM	BCl3 valve closed
2/7/2013	10:01:18 AM	PH3 valve closed
2/7/2013	10:01:18 AM	SiCl4 pre valve closed
2/7/2013	10:01:18 AM	SiCl4 post valve closed
2/7/2013	10:01:18 AM	Main Vac valve closed
2/7/2013	10:01:18 AM	Bypass valve closed
2/7/2013	10:01:18 AM	Bubbler valve closed
2/7/2013	10:01:18 AM	Helium MFC set to  0.000000
2/7/2013	10:01:18 AM	H2 MFC set to  0.000000
2/7/2013	10:01:18 AM	BCl3 MFC set to  0.000000
2/7/2013	10:01:18 AM	PH3 MFC set to  0.000000
2/7/2013	10:01:18 AM	SiCl4 MFC set to  0.000000
2/7/2013	10:01:18 AM	Bypass solenoid MFC set to  0.000000
2/7/2013	10:01:18 AM	Tube furnace set to 0
2/7/2013	10:01:21 AM	H2 valve closed
2/7/2013	10:01:21 AM	BCl3 valve closed
2/7/2013	10:01:21 AM	PH3 valve closed
2/7/2013	10:01:21 AM	SiCl4 pre valve closed
2/7/2013	10:01:21 AM	SiCl4 post valve closed
2/7/2013	10:01:21 AM	Main Vac valve closed
2/7/2013	10:01:21 AM	Bypass valve closed
2/7/2013	10:01:21 AM	Bubbler valve closed
2/7/2013	10:01:21 AM	Helium valve opened
2/7/2013	10:01:21 AM	Helium MFC set to  500.000000
2/7/2013	10:01:21 AM	H2 MFC set to  0.000000
2/7/2013	10:01:21 AM	BCl3 MFC set to  0.000000
2/7/2013	10:01:21 AM	PH3 MFC set to  0.000000
2/7/2013	10:01:21 AM	SiCl4 MFC set to  0.000000
2/7/2013	10:01:21 AM	Bypass solenoid MFC set to  0.000000
2/7/2013	10:01:22 AM	Tube furnace set to 0
2/7/2013	10:02:30 AM	Helium valve closed
2/7/2013	10:02:30 AM	H2 valve closed
2/7/2013	10:02:30 AM	BCl3 valve closed
2/7/2013	10:02:30 AM	PH3 valve closed
2/7/2013	10:02:30 AM	SiCl4 pre valve closed
2/7/2013	10:02:30 AM	SiCl4 post valve closed
2/7/2013	10:02:30 AM	Main Vac valve closed
2/7/2013	10:02:30 AM	Bypass valve closed
2/7/2013	10:02:30 AM	Bubbler valve closed
2/7/2013	10:02:30 AM	Helium MFC set to  0.000000
2/7/2013	10:02:30 AM	H2 MFC set to  0.000000
2/7/2013	10:02:30 AM	BCl3 MFC set to  0.000000
2/7/2013	10:02:30 AM	PH3 MFC set to  0.000000
2/7/2013	10:02:30 AM	SiCl4 MFC set to  0.000000
2/7/2013	10:02:30 AM	Bypass solenoid MFC set to  0.000000
2/7/2013	10:02:30 AM	Tube furnace set to 0
2/7/2013	10:02:31 AM	Run finished at 10:02 AM
2/7/2013	10:02:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/7/2013	10:04:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/7/2013	10:04:10 AM	Recipe started at 10:04 AM
2/7/2013	10:04:10 AM	Helium valve closed
2/7/2013	10:04:10 AM	H2 valve closed
2/7/2013	10:04:10 AM	BCl3 valve closed
2/7/2013	10:04:10 AM	PH3 valve closed
2/7/2013	10:04:10 AM	SiCl4 pre valve closed
2/7/2013	10:04:10 AM	SiCl4 post valve closed
2/7/2013	10:04:10 AM	Main Vac valve closed
2/7/2013	10:04:10 AM	Bubbler valve closed
2/7/2013	10:04:10 AM	Bypass valve opened
2/7/2013	10:04:10 AM	Helium MFC set to  0.000000
2/7/2013	10:04:10 AM	H2 MFC set to  0.000000
2/7/2013	10:04:10 AM	BCl3 MFC set to  0.000000
2/7/2013	10:04:10 AM	PH3 MFC set to  0.000000
2/7/2013	10:04:10 AM	SiCl4 MFC set to  0.000000
2/7/2013	10:04:10 AM	Bypass solenoid MFC set to  0.000000
2/7/2013	10:04:10 AM	Tube furnace set to 0
2/7/2013	10:05:23 AM	Helium valve closed
2/7/2013	10:05:23 AM	H2 valve closed
2/7/2013	10:05:23 AM	BCl3 valve closed
2/7/2013	10:05:23 AM	PH3 valve closed
2/7/2013	10:05:23 AM	SiCl4 pre valve closed
2/7/2013	10:05:23 AM	SiCl4 post valve closed
2/7/2013	10:05:23 AM	Main Vac valve closed
2/7/2013	10:05:23 AM	Bubbler valve closed
2/7/2013	10:05:23 AM	Bypass valve opened
2/7/2013	10:05:23 AM	Helium MFC set to  0.000000
2/7/2013	10:05:23 AM	H2 MFC set to  0.000000
2/7/2013	10:05:23 AM	BCl3 MFC set to  0.000000
2/7/2013	10:05:23 AM	PH3 MFC set to  0.000000
2/7/2013	10:05:23 AM	SiCl4 MFC set to  0.000000
2/7/2013	10:05:23 AM	Bypass solenoid MFC set to  0.000000
2/7/2013	10:05:23 AM	Tube furnace set to 0
2/7/2013	10:06:23 AM	Helium valve closed
2/7/2013	10:06:23 AM	H2 valve closed
2/7/2013	10:06:23 AM	BCl3 valve closed
2/7/2013	10:06:23 AM	PH3 valve closed
2/7/2013	10:06:23 AM	SiCl4 pre valve closed
2/7/2013	10:06:23 AM	SiCl4 post valve closed
2/7/2013	10:06:23 AM	Bypass valve closed
2/7/2013	10:06:23 AM	Bubbler valve closed
2/7/2013	10:06:23 AM	Main Vac valve opened
2/7/2013	10:06:23 AM	Helium MFC set to  0.000000
2/7/2013	10:06:23 AM	H2 MFC set to  0.000000
2/7/2013	10:06:23 AM	BCl3 MFC set to  0.000000
2/7/2013	10:06:23 AM	PH3 MFC set to  0.000000
2/7/2013	10:06:23 AM	SiCl4 MFC set to  0.000000
2/7/2013	10:06:23 AM	Bypass solenoid MFC set to  0.000000
2/7/2013	10:06:23 AM	Tube furnace set to 0
2/7/2013	10:06:24 AM	Run finished at 10:06 AM
2/7/2013	10:06:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
